执行标准

GB/T 3634.2-2011

GB/T 3634.2-2011

GB/T  3634.2-2011

产品等级

4.0N

5.0N

6.0N

H2

≥99.99%

≥99.999%

≥99.9999%

杂质含量

O2+Ar

≤5ppm

≤1.0ppm

≤0.2ppm

N2

≤60ppm

≤5.0ppm

≤0.4ppm

CO

≤5ppm

≤1.0ppm

≤0.1ppm

CO2

≤5ppm

≤1.0ppm

≤0.1ppm

CH4

≤10ppm

≤1.0ppm

≤0.2ppm

H2O

≤10ppm

≤3.0ppm

≤0.5ppm

总杂质

-

≤10.0ppm

≤1.0ppm