执行标准

GB/T 4842-2017

GB/T 4842-2017

Messer标准

产品等级

4.0N

5.0N

6.0N

Ar

≥99.99%

≥99.999%

≥99.9999%

杂质含量

H2

≤5ppm

≤0.5ppm

≤0.1ppm

O2

≤10ppm

≤1.5ppm

≤0.2ppm

N2

≤50ppm

≤4.0ppm

≤0.2ppm

CH4

≤5ppm

≤0.4ppm

≤0.1ppm

CO

≤5ppm

≤0.3ppm

≤0.1ppm

CO2

≤10ppm

≤0.3ppm

≤0.1ppm

H2O

≤15ppm

≤3.0ppm

≤0.5ppm

总杂质

-

-

≤1.0ppm