执行标准

GB/T 8979-2008

GB/T 8979-2008

GB/T  8979-2008

产品等级

4.0N

5.0N

6.0N

N2

≥99.99%

≥99.999%

≥99.9999%

杂质含量

H2

≤15ppm

≤1.0ppm

≤0.1ppm

O2

≤50ppm

≤3.0ppm

≤0.1ppm

Ar

-

-

≤2.0ppm

CO

≤5ppm

≤1.0ppm

≤0.1ppm

CO2

≤10ppm

≤1.0ppm

≤0.1ppm

CH4

≤5ppm

≤1.0ppm

≤0.1ppm

H2O

≤15ppm

≤3.0ppm

≤0.5ppm